Kvhler illumination
Kvhler illumination a method of illuminating the mask in a projection imaging system whereby a condenser lens forms an image of the illumination source at the entrance pupil (entrance aperture) of the objective lens, and the mask is at the exit pupil of the condenser lens.
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Author of the text: Ed. P.A. Laplante Boca Raton: CRC Press LLC, 2000
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